Nano Science and Technology Institute
Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 7: Micro Fluidics and Nanoscale Transport

Polymeric Micropump with SU-8 Check Valves Assembled by Lamination Technique

Authors:T.Q. Truong and N.T. Nguyen
Affilation:Nanyang Technological University, SG
Pages:280 - 283
Keywords:Microfluidics, micropump, SU-8 check valve, lamination
Abstract:This paper presents the first micropumps assembled using polymeric lamination technology. Each pump consists of two 100-m-thick, 10-mm-diameter SU-8 discs; two 1.5-mm-thick, 15-mm-diameter polymethylmethacrylate (PMMA) discs; and one piezo disc. The SU-8 parts were fabricated by a two-mask polymeric surface micromachining process. The PMMA parts were machined from a PMMA sheet by CO2-laser. The pump was assembled using adhesive bonding. The adhesive tapes were cut by the same laser system. With a drive voltage of 150 V the fabricated micropumps have been able to provide flow rates up to 2.9 ml/min and back pressures up to 1.6 m of water. The pump design and the polymeric technologies prove the feasibility of making more complex microfluidic systems based on the presented lamination approach.
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