Authors: H. Liu, A.A.O. Tay, S.Y.M. Wan and G.C. Lim
Affilation: Institute of Materials Research & Engineering, Singapore
Pages: 251 - 254
Keywords: polymer, laser microfabrication, fusion bonding, microvalve, flow rate
This paper presents the design, realization and simulation of a novel polymer based check-valve micropump actuated by piezoelectric disc. Comparing with silicon substrate, polymer materials have such advantages as flexibility, chemical and biological compatibility, 3D fabrication possibility and low cost in materials and mass production. Laser micromachining technology and precision engineering techniques were used to fabricate the prototype with the dimension of £X18mmx5.2mm. Results of preliminary experiments on fusion bonding between polyimide and polycarbonate are also presented. Using DI water as the pumping medium, the presented micropump is expected to achieve self-priming, bubble tolerance and low power consumption and a flow rate of 30µl/min at the resonance frequency of 300Hz.