Nano Science and Technology Institute
Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 10: Micro and Nano Structuring and Assembly

Direct Scanning Laser Writing of 3D Multilayer Microstructures

Authors:H. Yu, B. Li and X. Zhang
Affilation:Boston University, US
Pages:461 - 464
Keywords:3D microstructures, scanning laser direct writing
Abstract:Material processing with lasers is an expanding field since it not only makes manufacturing cheaper, faster, cleaner, and more accurate but also opens up entirely new technologies and manufacturing methods that are simply not available using standard techniques. In this paper, we demonstrate the use of a beam-scanning laser system for the rapid prototyping of 3-D microstructures in a negative photosensitive polymer (SU-8). Furthermore, with the aid of an auxiliary laser alignment setup, this technology could be readily extended to the flexible fabrication of 3-D multilayer microstructures, which promise to be of great importance for the coming biotechnology revolution. Hence it presents an alternative, novel approach to the fabrication of a class of MEMS devices.
Direct Scanning Laser Writing of 3D Multilayer MicrostructuresView PDF of paper
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