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 | Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 10: Micro and Nano Structuring and Assembly |
| | Micro Actuator Array based on Ionic Polymer with Patterned Self-Assembled Au Electrode | | Authors: | M. Le Guilly, C. Xu, M. Taya and Y. Kuga | | Affilation: | University of Washington, US | | Pages: | 455 - 458 | | Keywords: | ionic polymer, self assembly, plasma polymerization, array, patterning, MEMS | | Abstract: | A new fabrication technique is proposed to create electrodes on thin ionic polymer membranes for micro actuator applications. The technique consists in plasma deposition of a thin (a few nm) allylamine coating on the membrane followed by stepwise assembly of Au colloids on the amine surface into a conductive electrode. Patterned gold electrodes can be created by using a stencil mask during allylamine plasma deposition. The influence of the allylamine plasma conditions on the electrode and the subsequent actuator is studied. A Flemion membrane (14m) with a low power plasma allylamine coating and 10 sequential assemblies of Au colloids showed a fast, repeatable actuation at +/-1.5V. |  | View paper | | ISBN: | 0-9728422-7-6 |
| Pages: | 521 |
| Hardcopy: | $150.00 |
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