Micro Actuator Array based on Ionic Polymer with Patterned Self-Assembled Au Electrode

	Nanotech 2004 Vol. 1 Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1 Chapter 10: Micro and Nano Structuring and Assembly
	Micro Actuator Array based on Ionic Polymer with Patterned Self-Assembled Au Electrode
Authors:	M. Le Guilly, C. Xu, M. Taya and Y. Kuga
Affilation:	University of Washington, US
Pages:	455 - 458
Keywords:	ionic polymer, self assembly, plasma polymerization, array, patterning, MEMS
Abstract:	A new fabrication technique is proposed to create electrodes on thin ionic polymer membranes for micro actuator applications. The technique consists in plasma deposition of a thin (a few nm) allylamine coating on the membrane followed by stepwise assembly of Au colloids on the amine surface into a conductive electrode. Patterned gold electrodes can be created by using a stencil mask during allylamine plasma deposition. The influence of the allylamine plasma conditions on the electrode and the subsequent actuator is studied. A Flemion membrane (14m) with a low power plasma allylamine coating and 10 sequential assemblies of Au colloids showed a fast, repeatable actuation at +/-1.5V.
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ISBN:	0-9728422-7-6
Pages:	521
Hardcopy:	$79.95

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