Low K Carbon Films Deposited in Low Frequency Discharge for Sub-micron Devices

	Nanotech 2003 Vol. 3 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 3 Chapter 1: Micro and Nano Structuring and Assembly
	Low K Carbon Films Deposited in Low Frequency Discharge for Sub-micron Devices
Authors:	A. Kosarev, A. Torres and C. Zuniga
Affilation:	Institut National for Astrophysics, Optics and Electronics, MX
Pages:	29 - 32
Keywords:	materials, semiconductors
Abstract:	An interconnect delay begins to dominate total device delay time and consequently, operation rate at sub-micron (
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ISBN:	0-9728422-2-5
Pages:	560
Hardcopy:	$125.00
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