Nanotech 2003 Vol. 3
Nanotech 2003 Vol. 3
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 3

Micro and Nano Structuring and Assembly Chapter 1

Low K Carbon Films Deposited in Low Frequency Discharge for Sub-micron Devices

Authors: A. Kosarev, A. Torres and C. Zuniga

Affilation: Institut National for Astrophysics, Optics and Electronics, Mexico

Pages: 29 - 32

Keywords: materials, semiconductors

Abstract:
An interconnect delay begins to dominate total device delay time and consequently, operation rate at sub-micron (


ISBN: 0-9728422-2-5
Pages: 560

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