Nano Science and Technology Institute
Nanotech 2003 Vol. 3
Nanotech 2003 Vol. 3
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 1: Micro and Nano Structuring and Assembly
 

Low K Carbon Films Deposited in Low Frequency Discharge for Sub-micron Devices

Authors:A. Kosarev, A. Torres and C. Zuniga
Affilation:Institut National for Astrophysics, Optics and Electronics, MX
Pages:29 - 32
Keywords:materials, semiconductors
Abstract:An interconnect delay begins to dominate total device delay time and consequently, operation rate at sub-micron (
Low K Carbon Films Deposited in Low Frequency Discharge for Sub-micron DevicesView PDF of paper
ISBN:0-9728422-2-5
Pages:560
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