 | Nanotech 2003 Vol. 3
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 3
Chapter 1: Micro and Nano Structuring and Assembly |
Low K Carbon Films Deposited in Low Frequency Discharge for Sub-micron Devices | |
| Authors: | A. Kosarev, A. Torres and C. Zuniga |
| Affilation: | Institut National for Astrophysics, Optics and Electronics, MX |
| Pages: | 29 - 32 |
| Keywords: | materials, semiconductors |
| Abstract: | An interconnect delay begins to dominate total device delay time and consequently, operation rate at sub-micron ( |
 | View PDF of paper |
| ISBN: | 0-9728422-2-5 |
| Pages: | 560 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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