Micro and Nano Structuring and Assembly

Nanostructuring of Surfaces using Anodic Alumina Masks – Methods, materials and properties

Sawitowski T., Beyer N., Wagener S., Schulz F., AlCove Surfaces GmbH, DE

Since the discovery that cleanability is not necessarily linked to smoothness or gloss of surfaces it is interesting to take a closer look at methods allowing surfaces to be structured on a micrometer and nanometer [...]

Alignment Characteristic and Mechanism of Carbon Nanotubes Synthesized by Hot Filament Chemical Vapor Deposition in a CH4/H2 Plasma

Yang Q., Chen W., Singh A., Xiao C., Hirose A., University of Saskatchewan, CA

Controlling of the alignment of carbon nanotubes (CNTs) is very important for applications such as scanning probes, sensors, field emitters and nanoelectronics. Controlled growth of CNTs aligned at different angles to the substrate has been [...]

A Novel Simulation Methodology for Isotropic Gas Phase Etching

Bahreyni B., Shafai C., Card C.M., The University of Manitoba, CA

A novel methodology for the simulation of isotropic gas phase etching of a substrate is presented. In this method, individual substrate atoms are removed upon physical impingement of etchant gas molecules. The effects of different [...]

Synthesis and Characterization of Spiral Carbon Nanofibers Containing Pd Metal Cluster by using Pd2(dba)3 as Catalyst

Su C-J, Hsu L-S, Wu T-W., Liu C-J, Lin S-H, Chung Shan Medical University, TW

The spiral carbon nanofibers consisting of Pd metal cluster were grown by the Pd2(dba)3-catalyzed decomposition of gaseous acetylene on molecular sieves (Linde 13X) support. The microstructure and composition of the spiral carbon nanofibers were characterized [...]

Fabrication and Characterization of Cobalt Particles by Ion-beam Induced Chemical Vapor Deposition (IBICVD)

Lin K-W, Suzuki T., Kang K., Zhang Z., Toyota Technological Institute, JP

Nanometer-sized patterned media has been of great interest in high density data storage application [1,2]. Different fabrication techniques have been studied with its unique physical properties of nanoscale features. Among these, ion-beam induced chemical vapor [...]

Diamond Replicas on Silicon Substrate

Martins D.R., Mansano R., Verdonck P., Salvadori M.C., University of Sao Paulo, BR

Most microelectromechanical system (MEMS) devices have been based on silicon. This is due to the technological know-how accumulated on the manipulation, machining and manufacturing of silicon. However, the silicon properties are poor, especially when compared [...]

Electric Field Induced Self Assembly of Polymer Structures

Yang M., Ozkan C.S., Gao H., University of California Riverside, US

We have developed a method for fabricating polymer microstructures based on electric field induced self assembly and pattern formation. A dielectric fluid placed in between to conductive plates experiences a force in an applied electric [...]

Low K Carbon Films Deposited in Low Frequency Discharge for Sub-micron Devices

Kosarev A., Torres A., Zuniga C., Institut National for Astrophysics, Optics and Electronics, MX

An interconnect delay begins to dominate total device delay time and consequently, operation rate at sub-micron (

Synthesis and Application of Nanofabricated Nanoporous Materials

Park S-E, Hwang J.S., Hwang Y.K., Jhung S.H., Chang J-S, Hwang J.S., Hwang Y.K., Kim D.S., Korea Research Institute of Chemical Technology, KR

Zeolitic (molecular sieves) or mesoporous materials are the promising candidates for nanoscopically-engineered materials due to their well-defined pore structures, thermal stabilities and tailor-made synthetic abilities. Several zeolitic materials with the shape of nanorod or nanofiber [...]

Modeling and Simulation for Epitaxial Growth with Strain

Caflisch R.E., Connell C., Luo E., Gyure M., Simms G., Vvedensky D., UCLA, US

We describe a new approach to simulation of epitaxial growth with strain. An island dynamics model with a level set numerical method is used for the growth, a lattice statics model is used for the [...]

Self-assembly of Deinococcus Radiodurans S-layer Proteins

Lin J., Tan T.S.T., National Tsing Hua Univ., TW

Proteins capable of self-assembly are crucial to many bio-architectures and have potential applications in nanotechnology. An example is the group of proteins used to construct crystalline surface layers (S-layers) in nearly all archaebacteria and many [...]

Effects of Electric Field on the Growth of One-dimensional Carbon Materials in the Chemical Vapor Deposition Process

Tai N-H, Lee C.-Y., Chiu I-C, Lin I-N, National Tsing Hua University, TW

Effects of Electric Field on the Growth of One-dimensional Carbon Materials in the Chemical Vapor Deposition Process (PCVD) Nyan-Hwa Tai* a), Chi-Young Lee b), I-Chang Chiu a), and I-Nan Lin b) a)Department of Materials Science [...]

Step and Flash Imprint Lithography Using UV-transparent, Electrically Conductive Templates

Hooper A., Talin A.A., Dauksher W.J., Baker J.H., Convey D., Eschriech T., Resnick D.J., Bailey T.C., Johnson S., Willson C.G., Motorola Labs, US

Step and flash imprint lithography (SFIL) is a promising new technique capable of resolving sub 100nm features at a substantially lower cost than any other candidate method currently under development. Successful implementation of SFIL requires [...]

AFM Anodization Studied by Spectromicroscopy

Lazzarino M., Mori G., Ercolani D., Ressel B., Colli A., Sorba L., Locatelli A., Cherifi S., Ballestrazzi A., Heun S., Laboratorio TASC INFM, IT

The fabrication of state-of-the-art semiconductor nanostructures is of great interest both for fundamental physics and device applications. Besides the traditional lithography techniques, local anodic oxidation by atomic force microscopy (AFM) is emerging because of its [...]

Near-Field Nanomodification of Thin Films Using Femtosecond Laser and Atomic Force Microscope

Chimmalgi A., Choi T.Y., Grigoropoulos C.P., Wan D., Komvopoulos K., University of California-Berkeley, US

Nanostructures, which have characteristic dimensions that are difficult to achieve by conventional optical lithography techniques, are finding ever-increasing applications in a variety of fields. For applications incorporating nanodevices to gain widespread acceptance, high resolution, reliability [...]

Fabrication of 20 nm Embedded Longitudinal Nanochannels Transferred from Metal Nanowire Patterns

Choi D.S., Yang E.H., Jet Propulsion Laboratory, US

The traditional electron beam lithography and more recently developed focused ion beam (FIB) milling/lithography techniques have been exploited for generating exposed nanometer-size nanochannels. An additional process step of sealing exposed nanochannels cant be avoided to [...]