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 | Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Chapter 9: MEMS Design and Application |
| | Superharmonic Resonance of an Electrically Actuated Resonant Microsensor | | Authors: | E.M. Abdel-Rahman and A.H. Nayfeh | | Affilation: | Virginia Polytechnic Institute and State University, US | | Pages: | 440 - 443 | | Keywords: | MEMS, resonant sensors, forced vibrations, superharmonic resonance | | Abstract: | We investigate the response of a microbeam-based resonant sensor to a superharmonic electric actuation. The model incorporates the nonlinearities associated with moderately large displacements and electric forces. The method of multiple scales is used to obtain two first-order nonlinear ordinary-differential equations that describe the modulation of the amplitude and phase of the response and its stability. We present typical resonator frequency-response and force-response curves. The curves demonstrate the existence of multivalued solutions. These curves consist of three branches which meet at two saddle-node bifurcation points. The results provide an analytical tool to predict the microsensor response to a superharmonic excitation, specifically the locations of sudden jumps and regions of hysteretic behavior, thereby enabling designers to safely use this signal as a measuring signal. |  | View paper | | ISBN: | 0-9728422-1-7 |
| Pages: | 600 |
| Hardcopy: | $125.00 |
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