Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme

	Nanotech 2003 Vol. 2 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2 Chapter 9: MEMS Design and Application
	Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme
Authors:	O. Bochobza-Degani, D. Elata and Y. Nemirovsky
Affilation:	Electrical Engineering Department, Technion, IL
Pages:	436 - 439
Keywords:	charge pull-In, electrostatic actuation, modeling, numerical scheme
Abstract:	This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under voltage-control. Second, a novel numerical scheme for analyzing the stability and extracting the charge Pull-In parameters of charge-controlled actuators is proposed. Third, a novel strategy for further extending the travel-range of charge-controlled actuators is suggested.
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ISBN:	0-9728422-1-7
Pages:	600
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