Nano Science and Technology Institute
Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
 
Chapter 9: MEMS Design and Application
 

Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS

Authors:J.A. Pelesko, D.H. Bernstein and J. McCuan
Affilation:University of Delaware, US
Pages:432 - 435
Keywords:electrostatic actuation, mathematical model, symmetry breaking
Abstract:We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.
Symmetry and Symmetry Breaking in Electrostatically Actuated MEMSView PDF of paper
ISBN:0-9728422-1-7
Pages:600
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