Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2

MEMS Design and Application Chapter 9

Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS

Authors: J.A. Pelesko, D.H. Bernstein and J. McCuan

Affilation: University of Delaware, United States

Pages: 432 - 435

Keywords: electrostatic actuation, mathematical model, symmetry breaking

Abstract:
We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.


ISBN: 0-9728422-1-7
Pages: 600

2015 & Newer Proceedings

Nanotech Conference Proceedings are now published in the TechConnect Briefs

NSTI Online Community