Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2

MEMS Design and Application Chapter 9

Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors

Authors: J.H. Chen, W. Weingar, A. Azarov and R.C. Giles

Affilation: Agere Systems, United States

Pages: 424 - 427

Keywords: MEMS, mirror, pull-in effect, stabilization

Recently proposed optical subsystems utilizing micro-electromechanical components are being developed for use in photonic crossconnects, optical add/drop multiplexers, and spectral equalizers. Common elements to these subsystems are electrostatically actuated micromechanical tilt mirrors that steer optical beams to implement the subsystem function. In these applications, voltages are applied to mirror elements to change the mirror-tilting angle, on one or two axes. Feedback control methods are commonly used to obtain precise mirror orientations to minimize loss through optical switch fabrics or to stabilize attenuation through spectral equalizers. However, the mirror tilt angle range is limited because of inherent instability beyond a critical tilt angle (snapdown angle), and the usual feedback schemes do not counteract this effect. This paper describes control methods to enable operation of electrostatically actuated mirrors beyond the critical tilt angle, yielding advantages including greater scalability of switch arrays and increased dynamic range of attenuators.

Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors

ISBN: 0-9728422-1-7
Pages: 600