Authors: H. Koser, F. Cros, M.G. Allen, J.H. Lang
Affilation: Massachusetts Institute of Technology, United States
Pages: 408 - 411
Keywords: MEMS, magnetic diffusion, saturation, FDTD
As flux densities and frequencies are raised to increase the performance of magnetic micro-actuators, micro-motors/generators, and micro-inductors, eddy currents and magnetic saturation start to limit the performance of these devices. In this paper, we present a powerful numerical method based on a modified finite-difference time-domain (FDTD) simulation of Maxwell’s equations. This method successfully models both eddy currents and material saturation within a magnetic MEMS device. Experimental verification of the method is also presented.