 | Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Chapter 9: MEMS Design and Application |
| - | Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach |
| | H. Koser, F. Cros, M.G. Allen, J.H. Lang |
| | Massachusetts Institute of Technology, US |
| - | Mixed-Level Model for Highly Perforated Torsional Actuators Coupling the Mechanical, the Electrostatic and the Fluidic Domain |
| | R. Sattler, G. Schrag and G. Wachutka |
| | Institute for Physics of Electrotechnology, DE |
| - | System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models |
| | J.A. Martínez, T.P. Kurzweg, S.P. Levitan, A.J. Davare, M. Kahrs and D.M. Chiarulli |
| | University of Pittsburgh, US |
| - | Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer |
| | H. Xie, G.K. Fedder, Z. Pan and W. Frey |
| | University of Florida, US |
| - | Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors |
| | J.H. Chen, W. Weingar, A. Azarov and R.C. Giles |
| | Agere Systems, US |
| - | Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching |
| | J. Bryzek, S. Nasiri, A. Flannery, H. Kwon, M. Novack, D. Marx, El Sigari, E. Chen and J. Garate |
| | Transparent Networks, US |
| - | Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS |
| | J.A. Pelesko, D.H. Bernstein and J. McCuan |
| | University of Delaware, US |
| - | Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme |
| | O. Bochobza-Degani, D. Elata and Y. Nemirovsky |
| | Electrical Engineering Department, Technion, IL |
| - | Superharmonic Resonance of an Electrically Actuated Resonant Microsensor |
| | E.M. Abdel-Rahman and A.H. Nayfeh |
| | Virginia Polytechnic Institute and State University, US |
| - | Air Damping in an Ultra-High-Frequency Disk Resonator |
| | L.Y. Yap, L.K. Yap and W. Ye |
| | Georgia Institute of Technology, US |
| - | Monte Carlo Modeling of Micro-Scale Gas Flows |
| | J. Fan and C. Shen |
| | Chinese Academy of Sciences, CN |
| - | Size and Strain Rate Effects in Tensil Deformation of Cu Nanowires |
| | W. Liang and M. Zhou |
| | Georgia Institute of Technology, US |
| ISBN: | 0-9728422-1-7 |
| Pages: | 600 |
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