Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2

RF Device Design Chapter 8

RF-MEMS Voltage Tunable Capacitor using Electrostatic Forces

Authors: J. Lee, Y. Kim, D. Na and S. Park

Affilation: Kyungpook National University, Korea

Pages: 388 - 391

Keywords: RF, MEMS, tunable, capacitor, electrostatic

In this paper, we have proposed a fabrication method of a RF-MEMS voltage tunable capacitor using Au-electroplating technique, which has one movable parallel plate with various structure of beams. We applied an electrostatic method and electroplating technique. Electroplating technique is used to fabricate various geometric structures in the surface micromaching technology. In consequence, compared with conventional structures, the theoretical tuning range, Cmax/Cmin, can be widely ranged at the applied bias voltages.

RF-MEMS Voltage Tunable Capacitor using Electrostatic Forces

ISBN: 0-9728422-1-7
Pages: 600