Authors: I. Avdeev, M. Lovell and D. Onipede Jr.
Affilation: University of Pittsburgh, United States
Pages: 570 - 573
Keywords: combdrive, misalignment, modeling, FEA
In-plane combdrive misalignments are studied using developed analytical and numerical (FEA) models and techniques. Issues of decreasing precision and stability are discussed. The analytical models are closed form and can be used by designers of analog microdevices.