Study of Misaligned Lateral Combdrive Static Actuators

	Nanotech 2003 Vol. 2 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2 Chapter 12: Computational Methods and Numerics
	Study of Misaligned Lateral Combdrive Static Actuators
Authors:	I. Avdeev, M. Lovell and D. Onipede Jr.
Affilation:	University of Pittsburgh, US
Pages:	570 - 573
Keywords:	combdrive, misalignment, modeling, FEA
Abstract:	In-plane combdrive misalignments are studied using developed analytical and numerical (FEA) models and techniques. Issues of decreasing precision and stability are discussed. The analytical models are closed form and can be used by designers of analog microdevices.
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ISBN:	0-9728422-1-7
Pages:	600
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