Nano Science and Technology Institute
Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
 
Chapter 12: Computational Methods and Numerics
 

Study of Misaligned Lateral Combdrive Static Actuators

Authors:I. Avdeev, M. Lovell and D. Onipede Jr.
Affilation:University of Pittsburgh, US
Pages:570 - 573
Keywords:combdrive, misalignment, modeling, FEA
Abstract:In-plane combdrive misalignments are studied using developed analytical and numerical (FEA) models and techniques. Issues of decreasing precision and stability are discussed. The analytical models are closed form and can be used by designers of analog microdevices.
Study of Misaligned Lateral Combdrive Static ActuatorsView PDF of paper
ISBN:0-9728422-1-7
Pages:600
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