Nano Science and Technology Institute
Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Chapter 11: System Level Modeling

Model for Flow Resistance of a Rare Gas Accounting for Surface Roughness

Authors:T. Veijola
Affilation:Helsinki University of Technology, FI
Pages:492 - 495
Keywords:surface roughness, rare gas, flow resistance, compact model
Abstract:The contribution of surface roughness is included in the flow resistance of rare gas flow channels. The statistical properties of the surface are taken into account in the model applying a novel approximation for the normal distribution function. The model assumes that the flow channel height varies statistically. Both transverse and longitudinal roughness in wide rectangular ducts and in circular channels are discussed. Final simple models are given in a form of effective viscosity that accounts for both the gas rarefaction and surface roughness.
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