Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment
Authors:
L. Latorre, V. Beroulle and P. Nouet
Affilation:
LIRMM, FR
Pages:
472 - 475
Keywords:
CMOS MEMS, ASIC design, SPECTRE-RF, Verilog-A
Abstract:
This paper concerns the design and simulation of a CMOS MEMS-Based Spectrum Analyzer. A Mechanical structure is used for high-Q filtering. Modeling is presented together with associated Verilog-A module. Small signal analysis are then performed using the recently released Spectre-RF simulator.
