Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment

	Nanotech 2003 Vol. 2 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2 Chapter 10: MEMS Modeling
	Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment
Authors:	L. Latorre, V. Beroulle and P. Nouet
Affilation:	LIRMM, FR
Pages:	472 - 475
Keywords:	CMOS MEMS, ASIC design, SPECTRE-RF, Verilog-A
Abstract:	This paper concerns the design and simulation of a CMOS MEMS-Based Spectrum Analyzer. A Mechanical structure is used for high-Q filtering. Modeling is presented together with associated Verilog-A module. Small signal analysis are then performed using the recently released Spectre-RF simulator.
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ISBN:	0-9728422-1-7
Pages:	600
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