Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 10

Dynamic Simulation of MEMS Switches using Simulink
D.J. Combes, K.M. Brunson, R. John and T. Bunyan
QinetiQ Ltd, UK

A Systematic Approach to Macromodeling Complex MEMS Devices
G. Casinovi
Georgia Tech, US

Static and Dynamic Analysis of Silicon NEMS
Z. Tang and N.R. Aluru
University of Illinois, US

Heat Transfer Macromodels for MEMS Devices with 3D Geometries
C-C Yu and Y-J Yang
National Taiwan University, TW

Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment
L. Latorre, V. Beroulle and P. Nouet
LIRMM, FR

Algorithmic and Modeling Aspects in the Electro-thermal Simulation of Thermally Operated Microsystems
M. Rencz, V. Székely, A. Poppe, B. Courtois
Micred, HU

MEMulator: A fast and accurate Geometric Modeling, Visualization and Mesh Generation Tool for 3D MEMS Design and Simulation
T. Udeshi and E. Parker
Zyvex Corporation, US


ISBN: 0-9728422-1-7
Pages: 600