MEMS Modeling

	Nanotech 2003 Vol. 2 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2 Chapter 10: MEMS Modeling
-	Dynamic Simulation of MEMS Switches using Simulink
	D.J. Combes, K.M. Brunson, R. John and T. Bunyan
	QinetiQ Ltd, UK
-	A Systematic Approach to Macromodeling Complex MEMS Devices
	G. Casinovi
	Georgia Tech, US
-	Static and Dynamic Analysis of Silicon NEMS
	Z. Tang and N.R. Aluru
	University of Illinois, US
-	Heat Transfer Macromodels for MEMS Devices with 3D Geometries
	C-C Yu and Y-J Yang
	National Taiwan University, TW
-	Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment
	L. Latorre, V. Beroulle and P. Nouet
	LIRMM, FR
-	Algorithmic and Modeling Aspects in the Electro-thermal Simulation of Thermally Operated Microsystems
	M. Rencz, V. Székely, A. Poppe, B. Courtois
	Micred, HU
-	MEMulator: A fast and accurate Geometric Modeling, Visualization and Mesh Generation Tool for 3D MEMS Design and Simulation
	T. Udeshi and E. Parker
	Zyvex Corporation, US
ISBN:	0-9728422-1-7
Pages:	600
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