Nano Science and Technology Institute
Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2

Chapter 10:

MEMS Modeling

-Dynamic Simulation of MEMS Switches using Simulink
 D.J. Combes, K.M. Brunson, R. John and T. Bunyan
 QinetiQ Ltd, UK
-A Systematic Approach to Macromodeling Complex MEMS Devices
 G. Casinovi
 Georgia Tech, US
-Static and Dynamic Analysis of Silicon NEMS
 Z. Tang and N.R. Aluru
 University of Illinois, US
-Heat Transfer Macromodels for MEMS Devices with 3D Geometries
 C-C Yu and Y-J Yang
 National Taiwan University, TW
-Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment
 L. Latorre, V. Beroulle and P. Nouet
-Algorithmic and Modeling Aspects in the Electro-thermal Simulation of Thermally Operated Microsystems
 M. Rencz, V. SzĂ©kely, A. Poppe, B. Courtois
 Micred, HU
-MEMulator: A fast and accurate Geometric Modeling, Visualization and Mesh Generation Tool for 3D MEMS Design and Simulation
 T. Udeshi and E. Parker
 Zyvex Corporation, US
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