Surface Micromachined Viscous Spiral Pump

	Nanotech 2003 Vol. 1 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1 Chapter 9: Micro Fluidics
	Surface Micromachined Viscous Spiral Pump
Authors:	M.I. Kilani, P.G. Galambos, Y. Haik and C.J. Chen
Affilation:	Florida State University, US
Pages:	210 - 213
Keywords:	pump, spiral
Abstract:	This paper introduces a new viscous micropump produced using surface micromachining technology. The pump consists of a disk with a spiral protrusion that rotates at a close proximity over a stationary plate. Fluid contained in the spiral channel created by this geometry is subject to a net tangential viscous stress and a positive pressure gradient is established in the direction of flow. The paper describes the design and fluid modeling of the micro spiral pump.
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ISBN:	0-9728422-0-9
Pages:	560
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