Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 9: Micro Fluidics

Surface Micromachined Viscous Spiral Pump

Authors:M.I. Kilani, P.G. Galambos, Y. Haik and C.J. Chen
Affilation:Florida State University, US
Pages:210 - 213
Keywords:pump, spiral
Abstract:This paper introduces a new viscous micropump produced using surface micromachining technology. The pump consists of a disk with a spiral protrusion that rotates at a close proximity over a stationary plate. Fluid contained in the spiral channel created by this geometry is subject to a net tangential viscous stress and a positive pressure gradient is established in the direction of flow. The paper describes the design and fluid modeling of the micro spiral pump.
Surface Micromachined Viscous Spiral PumpView PDF of paper
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