Analytical Analysis of a Squeeze Film Dominated MEMS Fluid Ejector

	Nanotech 2003 Vol. 1 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1 Chapter 9: Micro Fluidics
	Analytical Analysis of a Squeeze Film Dominated MEMS Fluid Ejector
Authors:	E.P. Furlani and J.A. Lebens
Affilation:	Eastman Kodak Company, US
Pages:	162 - 165
Keywords:	microfluidic systems
Abstract:	We present an analytical model for predicting the behavior of a squeeze film dominated MEMS fluid ejector. The device consists of a piston that moves parallel to an orifice plate, with a thin film of fluid between the two that is fed by a reservoir (Fig. 1). An electrostatic version of this ejector has been fabricated at Sandia National Laboratories using the SUMMiT process. To date, this device has been simulated numerically using the finite element-based GOMA program. In this paper, we present a new analytical model for predicting its performance. One of our key results is an expression for the pressure distribution in the fluid generated by the piston, as it moves toward the orifice....
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ISBN:	0-9728422-0-9
Pages:	560
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