Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

Chapter 13:

Wafer and MEMS Processing

-Fabrication of 3D MEMS Antenna Array for Infrared Detector Using Novel UV-Lithography Apparatus, Plastic Micro Machining and Micro Assembly Technique
 J.Y. Park, K.T. Kim, S. Moon and J.J. Pak
 Korea Institute of Science and Technology, KR
-Fabrication of High Quality PZT Thick Film Using Lift-Off Technique
 H.J. Zhao, T.L. Ren, J.S. Liu, L.T. Liu and Z.J. Li
 Institute of Microelectronics, Tsinghua University, CN
-A New, Topology Driven Method for Automatic Mask Generation from Three-Dimensional Models
 R. Schiek and R. Schmidt
 Sandia National Laboratories, US
-Modeling and Simulation of Micromachined Needles
 P. Zhang and G.A. Jullien
 University of Calgary, CA
-A Study on the Fabrication of Micro Structure using Chemical Mechanical Micro Machining Process
 J.M. Park, H.W. Lee and H.D. Jeong
 Pusan National University, KR
-Introduction of Micro-Manipulation by Adhesional Force and Dielectric Force
 K. Takahashi, Y. An, S. Saito and T. OnzawaTadao
 Tokyo Institute of Technology, JP
-A Fluoro-ethoxysilane-Based Stiction-Free Release Process for Submicron Gap MEMS
 B. Parvais, A. Pallandre, A.M. Jonas and J-P Raskin
 Universit√© catholique de Louvain, BE
-Parallel Plate Plasma Etching for MEMS Processing-Reactor Modelling
 F. Babarada, C. Dunare and M. Profirescu
 University Politehnica Bucharest, RO
-Wafer-Level High Density Multifunctional Integration (HDMI) for Low-Cost Micro/Nano/Electro-Opto/Bio Heterogeneous Systems
 R.J. Gutmann, J-Q Lu, J.J. McMahon, P.D. Persans, T.S. Cale, E.T. Eisenbraun, J. Castracane and A.E Kaloyeros
 Rensselaer Polytechnic Institute, US
-Nanomachining on Si (100) Surfaces Using an Atomic Force Microscope with Lateral Force Transducer
 Y. Ichida, Y. Morimoto, R. Sato and M. Murakami
 Utsunomiya University, JP
-Local Oxidation Characteristics of Single Crystal Silicon
 Y. Ichida, Y. Morimoto, R. Sato and N. Saito
 Utsunomiya University, JP
-A Novel Method of Stereolithographic Alignment for MEMS Structures
 A. Choudhury and P.J. Hesketh
 Georgia Institute of Technology, US
-Process for Extremely Thin Silicon-on-Insulator Wafer
 A.Y. Usenko, W.N. Carr and B. Chen
 Silicon Wafer Technologies, Inc., US
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