Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

Wafer and MEMS Processing Chapter 13

Fabrication of 3D MEMS Antenna Array for Infrared Detector Using Novel UV-Lithography Apparatus, Plastic Micro Machining and Micro Assembly Technique
J.Y. Park, K.T. Kim, S. Moon and J.J. Pak
Korea Institute of Science and Technology, KR

Fabrication of High Quality PZT Thick Film Using Lift-Off Technique
H.J. Zhao, T.L. Ren, J.S. Liu, L.T. Liu and Z.J. Li
Institute of Microelectronics, Tsinghua University, CN

A New, Topology Driven Method for Automatic Mask Generation from Three-Dimensional Models
R. Schiek and R. Schmidt
Sandia National Laboratories, US

Modeling and Simulation of Micromachined Needles
P. Zhang and G.A. Jullien
University of Calgary, CA

A Study on the Fabrication of Micro Structure using Chemical Mechanical Micro Machining Process
J.M. Park, H.W. Lee and H.D. Jeong
Pusan National University, KR

Introduction of Micro-Manipulation by Adhesional Force and Dielectric Force
K. Takahashi, Y. An, S. Saito and T. OnzawaTadao
Tokyo Institute of Technology, JP

A Fluoro-ethoxysilane-Based Stiction-Free Release Process for Submicron Gap MEMS
B. Parvais, A. Pallandre, A.M. Jonas and J-P Raskin
Université catholique de Louvain, BE

Parallel Plate Plasma Etching for MEMS Processing-Reactor Modelling
F. Babarada, C. Dunare and M. Profirescu
University Politehnica Bucharest, RO

Wafer-Level High Density Multifunctional Integration (HDMI) for Low-Cost Micro/Nano/Electro-Opto/Bio Heterogeneous Systems
R.J. Gutmann, J-Q Lu, J.J. McMahon, P.D. Persans, T.S. Cale, E.T. Eisenbraun, J. Castracane and A.E Kaloyeros
Rensselaer Polytechnic Institute, US

Nanomachining on Si (100) Surfaces Using an Atomic Force Microscope with Lateral Force Transducer
Y. Ichida, Y. Morimoto, R. Sato and M. Murakami
Utsunomiya University, JP

Local Oxidation Characteristics of Single Crystal Silicon
Y. Ichida, Y. Morimoto, R. Sato and N. Saito
Utsunomiya University, JP

A Novel Method of Stereolithographic Alignment for MEMS Structures
A. Choudhury and P.J. Hesketh
Georgia Institute of Technology, US

Process for Extremely Thin Silicon-on-Insulator Wafer
A.Y. Usenko, W.N. Carr and B. Chen
Silicon Wafer Technologies, Inc.,, US


ISBN: 0-9728422-0-9
Pages: 560