 | Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 13: Wafer and MEMS Processing |
| - | Fabrication of 3D MEMS Antenna Array for Infrared Detector Using Novel UV-Lithography Apparatus, Plastic Micro Machining and Micro Assembly Technique |
| | J.Y. Park, K.T. Kim, S. Moon and J.J. Pak |
| | Korea Institute of Science and Technology, KR |
| - | Fabrication of High Quality PZT Thick Film Using Lift-Off Technique |
| | H.J. Zhao, T.L. Ren, J.S. Liu, L.T. Liu and Z.J. Li |
| | Institute of Microelectronics, Tsinghua University, CN |
| - | A New, Topology Driven Method for Automatic Mask Generation from Three-Dimensional Models |
| | R. Schiek and R. Schmidt |
| | Sandia National Laboratories, US |
| - | Modeling and Simulation of Micromachined Needles |
| | P. Zhang and G.A. Jullien |
| | University of Calgary, CA |
| - | A Study on the Fabrication of Micro Structure using Chemical Mechanical Micro Machining Process |
| | J.M. Park, H.W. Lee and H.D. Jeong |
| | Pusan National University, KR |
| - | Introduction of Micro-Manipulation by Adhesional Force and Dielectric Force |
| | K. Takahashi, Y. An, S. Saito and T. OnzawaTadao |
| | Tokyo Institute of Technology, JP |
| - | A Fluoro-ethoxysilane-Based Stiction-Free Release Process for Submicron Gap MEMS |
| | B. Parvais, A. Pallandre, A.M. Jonas and J-P Raskin |
| | Université catholique de Louvain, BE |
| - | Parallel Plate Plasma Etching for MEMS Processing-Reactor Modelling |
| | F. Babarada, C. Dunare and M. Profirescu |
| | University Politehnica Bucharest, RO |
| - | Wafer-Level High Density Multifunctional Integration (HDMI) for Low-Cost Micro/Nano/Electro-Opto/Bio Heterogeneous Systems |
| | R.J. Gutmann, J-Q Lu, J.J. McMahon, P.D. Persans, T.S. Cale, E.T. Eisenbraun, J. Castracane and A.E Kaloyeros |
| | Rensselaer Polytechnic Institute, US |
| - | Nanomachining on Si (100) Surfaces Using an Atomic Force Microscope with Lateral Force Transducer |
| | Y. Ichida, Y. Morimoto, R. Sato and M. Murakami |
| | Utsunomiya University, JP |
| - | Local Oxidation Characteristics of Single Crystal Silicon |
| | Y. Ichida, Y. Morimoto, R. Sato and N. Saito |
| | Utsunomiya University, JP |
| - | A Novel Method of Stereolithographic Alignment for MEMS Structures |
| | A. Choudhury and P.J. Hesketh |
| | Georgia Institute of Technology, US |
| - | Process for Extremely Thin Silicon-on-Insulator Wafer |
| | A.Y. Usenko, W.N. Carr and B. Chen |
| | Silicon Wafer Technologies, Inc., US |
| - | Fabrication of 3D MEMS Antenna Array for Infrared Detector Using Novel UV-Lithography Apparatus, Plastic Micro Machining and Micro Assembly Technique |
| | J.Y. Park, K.T. Kim, S. Moon and J.J. Pak |
| | Korea Institute of Science and Technology, KR |
| - | Fabrication of High Quality PZT Thick Film Using Lift-Off Technique |
| | H.J. Zhao, T.L. Ren, J.S. Liu, L.T. Liu and Z.J. Li |
| | Institute of Microelectronics, Tsinghua University, CN |
| - | A New, Topology Driven Method for Automatic Mask Generation from Three-Dimensional Models |
| | R. Schiek and R. Schmidt |
| | Sandia National Laboratories, US |
| - | Modeling and Simulation of Micromachined Needles |
| | P. Zhang and G.A. Jullien |
| | University of Calgary, CA |
| - | A Study on the Fabrication of Micro Structure using Chemical Mechanical Micro Machining Process |
| | J.M. Park, H.W. Lee and H.D. Jeong |
| | Pusan National University, KR |
| - | Introduction of Micro-Manipulation by Adhesional Force and Dielectric Force |
| | K. Takahashi, Y. An, S. Saito and T. OnzawaTadao |
| | Tokyo Institute of Technology, JP |
| - | A Fluoro-ethoxysilane-Based Stiction-Free Release Process for Submicron Gap MEMS |
| | B. Parvais, A. Pallandre, A.M. Jonas and J-P Raskin |
| | Université catholique de Louvain, BE |
| - | Parallel Plate Plasma Etching for MEMS Processing-Reactor Modelling |
| | F. Babarada, C. Dunare and M. Profirescu |
| | University Politehnica Bucharest, RO |
| - | Wafer-Level High Density Multifunctional Integration (HDMI) for Low-Cost Micro/Nano/Electro-Opto/Bio Heterogeneous Systems |
| | R.J. Gutmann, J-Q Lu, J.J. McMahon, P.D. Persans, T.S. Cale, E.T. Eisenbraun, J. Castracane and A.E Kaloyeros |
| | Rensselaer Polytechnic Institute, US |
| - | Nanomachining on Si (100) Surfaces Using an Atomic Force Microscope with Lateral Force Transducer |
| | Y. Ichida, Y. Morimoto, R. Sato and M. Murakami |
| | Utsunomiya University, JP |
| - | Local Oxidation Characteristics of Single Crystal Silicon |
| | Y. Ichida, Y. Morimoto, R. Sato and N. Saito |
| | Utsunomiya University, JP |
| - | A Novel Method of Stereolithographic Alignment for MEMS Structures |
| | A. Choudhury and P.J. Hesketh |
| | Georgia Institute of Technology, US |
| - | Process for Extremely Thin Silicon-on-Insulator Wafer |
| | A.Y. Usenko, W.N. Carr and B. Chen |
| | Silicon Wafer Technologies, Inc., US |
| ISBN: | 0-9728422-0-9 |
| Pages: | 560 |
| Hardcopy: | $125.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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