Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
 
Chapter 12: Characterization and Parameter Extraction
 

Diamond Materials for MEMS and NEMS Structures and Devices

Authors:J.E. Butler, T. Feygelson, L. Sekaric, H. Craighead, J. Wang and C.T.-C. Nguyen
Affilation:Naval Research Laboratory, US
Pages:474 - 477
Keywords:diamond, MEMS, NEMS, resonators
Abstract:Diamond materials offer great potential for many MEMS and NES applications. Amongst the attractive technological properties of diamond materials are the high stiffness, thermal conductivity, optical transparency range, chemical stability and erosion resistance, and dopant controlled variable electrical resistivity. The nucleation and growth by microwave plasma chemical vapor deposition of conformal nanocrystalline diamond films ranging in thickness from 100 nm to 5 microns, and the fabrication of MEMS and NEMS structures integrated with Si based substrates will be presented. These nanocrystalline films have been shown to have high optical quality, high thermal conductivity and a Youngs modulus nearly that of single crystal diamond. The results of various characterizations of the material quality will be given, along with examples of several MEMS and NEMS structures and devices.
Diamond Materials for MEMS and NEMS Structures and DevicesView PDF of paper
ISBN:0-9728422-0-9
Pages:560
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