Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

Characterization and Parameter Extraction Chapter 12

An efficient Adaptive Single-Mode (ASM) Pull-In Extraction Algorithm for Computer Aided Design of Electrostatic MEMS Devices

Authors: D. Elata, O. Bochobza-Degani and Y. Nemirovsky

Affilation: Technion - Israel Institute of Technology, Israel

Pages: 464 - 467

Keywords: pull-In, ASM, DIPIE, algorithm

This paper presents a novel Adaptive Single-Mode (ASM) Pull-In extraction scheme for CAD of electrostatic MEMS. The scheme is 50 to 1000 times faster than various previously suggested methods. The extracted Pull-In parameters are shown to agree well with previous methods simulations. In the new algorithm presented here, a continuously corrected single-mode is used, to better capture the change in the deformation mode in loaded states. This is in contrast to the predetermined modes used in prevalent RO methods. The first single approximation mode is the small deformations solution. The iterative scheme is constructed of two modules. The first module approximates the deformation by scalar amplitude multiplying the single-mode. The Pull-In state, which is associated with the maximum voltage, is searched by iteratively modifying this amplitude. In the second module the single-mode is corrected using a DIPIE inner-loop step, while setting the deflection of a pre-chosen node at the value calculated by the first module. The corrected single-mode is fed back into the first module. The sequential process is repeated until the extracted Pull-In parameters (i.e., Pull-In voltage and deformation) converge.

ISBN: 0-9728422-0-9
Pages: 560

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