Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

Chapter 12:

Characterization and Parameter Extraction

-An efficient Adaptive Single-Mode (ASM) Pull-In Extraction Algorithm for Computer Aided Design of Electrostatic MEMS Devices
 D. Elata, O. Bochobza-Degani and Y. Nemirovsky
 Technion - Israel Institute of Technology, IL
-Nano-bending Method to Identify the Residual Stresses of MEMS Films
 J.H. Kim, J.G. Kim, J.H. Hahn, H.Y. Lee, Y.H. Kim
 Seoul National University, KR
-Diamond Materials for MEMS and NEMS Structures and Devices
 J.E. Butler, T. Feygelson, L. Sekaric, H. Craighead, J. Wang and C.T.-C. Nguyen
 Naval Research Laboratory, US
-Frequency Tuning of Silicon Micromechanical Cantilevers by Laser Ablation
 B.J. Gallacher, J. Hedley, J.S. Burdess and A.J. Harris
 Newcastle University, UK
-Modeling Electrothermal Plastic Deformation
 A. Geisberger, N. Sarkar, M. Ellis and G. Skidmore
 Zyvex Corporation, US
-Adaption of the 3w-Method for Testing of MEMS
 C. Raudzis, F. Schatz and D. Wharam
 Corporate Research, Robert Bosch GmbH, DE
-A Modeling Approach based on Laminated Plate Theory to Design Microbeams
 S.C. Mantell , E. Longmire and D. Wolters
 University of Minnesota, US
-Characterization of Microscale Material Behavior with MEMS Resonators
 C.D. White, R. Xu, X. Sun and K. Komvopoulos
 University of California Berkeley, US
ISBN:0-9728422-0-9
Pages:560
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