Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 11: MEMS Design and Application

Development of the Multi-pixel X-ray Microcalorimeters

Authors:H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, H. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N.Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. Fujimori, Y. Ishisaki, U. Morita, T. Ohashi, Y. Kuroda, M. Onishi and K. Otake
Affilation:Waseda University, JP
Pages:436 - 439
Keywords:MEMS, X-ray, calorimeter, thermal sensor
Abstract:We are developing a multi-pixel x-ray microcalorimeters in order to realize good energy resolution x-ray imaging for future Japanese X-ray astronomy missions. The energy resolutions of 10eV at 6keV and 32x32 pixels of arrayed x-ray microcalorimeters are required for this purpose. The advantages of x-ray microcalorimeters are clear compared with common x-ray sensors. The most popular x-ray imaging spectrometer is an x-ray CCD. The energy resolution of an x-ray CCD is theoretically limited to ~120eV at 6keV. A grating is usually used as a good energy resolution spectrometer particularly below 1~2eV. However the efficiency of the grating is poor. An x-ray microcalorimeter is fabricated and tested. A superconducting phase transition edge sensor is applied for the x-ray microcalorimeter. The energy resolution of 34 eV at 6keV incident x-ray photon is obtained under 151mk of operating temperature. Details of the x-ray microcalorimeter, signal processing and the latest progress will be presented.
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