Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

A Nanoscopic Rotary Electrostatic Motor

Authors: J.H. Wright, D.P. Sheehan and T.F. Schubert Jr.

Affilation: University of San Diego, United States

Pages: 424 - 427

Keywords: MEMS, nanotechnology, motor power propulsion

Abstract:
A Nanoscopic Rotary Electrostatic Motor [J.H. Wright (Dept. Mathematics and Computer Science), and D.P. Sheehan (Dept. Physics), University of San Diego, San Diego, CA 92110] A novel, rotary, sub-micron, solid-state motor is introduced that uses the electric field energy of an open-gap p-n junction (Sheehan, Putnam and Wright, Found. Phys. 32 p. 1557, 2002). The open-gap voltage may be provided either via external bias or via the thermally generated electric field inherent in the depletion region of a standard p-n junction. Through variation of design parameters or applied external bias, the mechanical output power can be adjusted through several orders of magnitude, in excess of 10^(-8) W for device size scales ranging from 10^(-7) to 10^(-4) m per side, with corresponding high power densities in excess of 1 GW/m^3. Basic motor operation is derived using an analytic 1-D model and a numerical 2-D model. Potential applications include mechanical drives for micro-and nano-scale machines and manipulators, microfluid and thermal pumps, propulsion and inertial guidance of machines, thermal sensors, and high-frequency oscillators. Analysis indicates frequency can be controlled by voltage, with upper-limit frequencies in excess of 50MHz. Laboratory tests and construction of this device appear feasible in the near term.


ISBN: 0-9728422-0-9
Pages: 560

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