Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Design and Simulation of a MicroElectroMechanical Resonator Oscillator

Authors: M. Parlak, M. Naseer and Y. Gurbuz

Affilation: Sabanci University, Turkey

Pages: 408 - 411

Keywords: RF MEMS, oscillator, resonator

Abstract:
MicroElectroMechanical (MEM) vibrating structures such as linear drive resonators can be used as driving components in signal processing applications. The choice of these components is assisted by the fact that these MEM devices display high quality factor values when operated under vacuum. The design of a highly stable oscillator is an example utilizing the linear drive resonators and working samples are demonstrated at 16.5 kHz. For this oscillator to be used in portable communication devices, the operating frequency will have to be increased to at least 455 kHz which is the threshold of IF. In this paper a design of 458 kHz oscillator is simulated and prepared for implementation by properly adjusting the physical dimensions of the micromechanical resonator. For the case of 458 kHz amplitude stability is studied and to ensure minimum phase noise, proper feedback amplifier is designed.

Design and Simulation of a MicroElectroMechanical Resonator Oscillator

ISBN: 0-9728422-0-9
Pages: 560