![]() | Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 11: MEMS Design and Application |
Operation and Testing of a Micro Heat Engine | |
| Authors: | S. Whalen, R. Richards, D. Bahr and C. Richards |
| Affilation: | Washington State University, US |
| Pages: | 404 - 407 |
| Keywords: | MEMS power, micro heat engine, piezoelectric power |
| Abstract: | The development and testing of a micro heat engine is presented. For the first time the production of electrical power by a dynamic micro heat engine is demonstrated. The prototype micro heat engine is an external combustion engine, in which thermal power is converted to mechanical power through the use of a novel thermodynamic cycle. Mechanical power is converted into electrical power through the use of a thin-film piezoelectric membrane generator. This design is well suited to photolithography-based batch fabrication methods, and is unlike any conventionally manufactured macro-scale engine. |
![]() | View PDF of paper |
| ISBN: | 0-9728422-0-9 |
| Pages: | 560 |
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