Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
 
Chapter 11: MEMS Design and Application
 

Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications

Authors:E. Sarajlic, E. Berenschot, G. Krijnen, M. Elwenspoek
Affilation:University of Twente, NL
Pages:392 - 395
Keywords:electrostatic actuators, trench islolation
Abstract:An electrostatic microactuator suitable for low displacement applications is successfully fabricated and tested. A large force (>1mN) with a controllable nanometer resolution step (
Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement ApplicationsView PDF of paper
ISBN:0-9728422-0-9
Pages:560
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