Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications

	Nanotech 2003 Vol. 1 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1 Chapter 11: MEMS Design and Application
	Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications
Authors:	E. Sarajlic, E. Berenschot, G. Krijnen, M. Elwenspoek
Affilation:	University of Twente, NL
Pages:	392 - 395
Keywords:	electrostatic actuators, trench islolation
Abstract:	An electrostatic microactuator suitable for low displacement applications is successfully fabricated and tested. A large force (>1mN) with a controllable nanometer resolution step (
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ISBN:	0-9728422-0-9
Pages:	560
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