Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications

Authors: E. Sarajlic, E. Berenschot, G. Krijnen, M. Elwenspoek

Affilation: University of Twente, Netherlands

Pages: 392 - 395

Keywords: electrostatic actuators, trench islolation

Abstract:
An electrostatic microactuator suitable for low displacement applications is successfully fabricated and tested. A large force (>1mN) with a controllable nanometer resolution step (

Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications

ISBN: 0-9728422-0-9
Pages: 560