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 | Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 11: MEMS Design and Application |
| | Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures | | Authors: | E. Socher, O. Bochobza-Degani, D. Elata and Y. Nemirovsky | | Affilation: | Israel Institute of Technology, IL | | Pages: | 384 - 387 | | Keywords: | electro-thermal modeling, thermal runaway, burn-out, numerical scheme | | Abstract: | This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The novel scheme can capture the thermal instabilities under both voltage and current control. The model is compared with experimental data showing good agreement. |  | View paper | | ISBN: | 0-9728422-0-9 |
| Pages: | 560 |
| Hardcopy: | $125.00 |
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