Authors: E. Socher, O. Bochobza-Degani, D. Elata and Y. Nemirovsky
Affilation: Israel Institute of Technology, Israel
Pages: 384 - 387
Keywords: electro-thermal modeling, thermal runaway, burn-out, numerical scheme
This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The novel scheme can capture the thermal instabilities under both voltage and current control. The model is compared with experimental data showing good agreement.