Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures

	Nanotech 2003 Vol. 1 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1 Chapter 11: MEMS Design and Application
	Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures
Authors:	E. Socher, O. Bochobza-Degani, D. Elata and Y. Nemirovsky
Affilation:	Israel Institute of Technology, IL
Pages:	384 - 387
Keywords:	electro-thermal modeling, thermal runaway, burn-out, numerical scheme
Abstract:	This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The novel scheme can capture the thermal instabilities under both voltage and current control. The model is compared with experimental data showing good agreement.
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ISBN:	0-9728422-0-9
Pages:	560
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