Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures

Authors: E. Socher, O. Bochobza-Degani, D. Elata and Y. Nemirovsky

Affilation: Israel Institute of Technology, Israel

Pages: 384 - 387

Keywords: electro-thermal modeling, thermal runaway, burn-out, numerical scheme

Abstract:
This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The novel scheme can capture the thermal instabilities under both voltage and current control. The model is compared with experimental data showing good agreement.

Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures

ISBN: 0-9728422-0-9
Pages: 560