Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 11: MEMS Design and Application

Optimization of Thermally Actuated Bimorph Cantilevers for Maximum Deflection

Authors:W. Peng, Z. Xiao and K.R. Farmer
Affilation:New Jersey Institute of Technology, US
Pages:376 - 379
Keywords:MEMS, bimorph cantilever optimization, maximum deflection, FEM
Abstract:Theoretical analysis of thermally actuated bimorph cantilevers is presented to find the optimum condition for maximum deflection. The relations between material properties, dimensions and deflections are discussed in detail to understand the mechanism. Optimum condition is then derived based on deflection equation, which leads to maximum deflection and design criteria. This approach is verified by finite element method and can be used as a rule in bimorph cantilever design. Examples of showing how to use it in practice is illustrated, which is much easier and straightforward compare to numeration and simulation without loosing accuracy, showing that substantial improvements in bimorph cantilever design are possible.
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