Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
 
Chapter 11: MEMS Design and Application
 

Design of Performance-Enhanced Fabry-Perot Micro-Cavity Structure With a Novel Single Deeply Corrugated Diaphragm

Authors:W.J. Wang, R.J. Lin and D.G. Guo
Affilation:Nanyang Technological University, SG
Pages:336 - 339
Keywords:single deeply corrugated diaphragm, Fabry-Perot, sensor
Abstract:The silicon micromachining technique has been successfully applied to the fabrication of miniature Fabry-Perot sensors. This kind of sensor detects changes in optical path length induced by either a change in the refractive index or a change in physical length of the cavity. In this paper, a novel single deeply corrugated diaphragm (SDCD) structure has been proposed for Fabry-Perot sensor with improved mechanical sensitivity and signal-averaging effect compared to the conventional flat and shallow corrugated diaphragms.
Design of Performance-Enhanced Fabry-Perot Micro-Cavity Structure With a Novel Single Deeply Corrugated DiaphragmView PDF of paper
ISBN:0-9728422-0-9
Pages:560
Up
© 2014 Nano Science and Technology Institute. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Site Map