Authors: W.J. Wang, R.J. Lin and D.G. Guo
Affilation: Nanyang Technological University, Singapore
Pages: 336 - 339
Keywords: single deeply corrugated diaphragm, Fabry-Perot, sensor
The silicon micromachining technique has been successfully applied to the fabrication of miniature Fabry-Perot sensors. This kind of sensor detects changes in optical path length induced by either a change in the refractive index or a change in physical length of the cavity. In this paper, a novel single deeply corrugated diaphragm (SDCD) structure has been proposed for Fabry-Perot sensor with improved mechanical sensitivity and signal-averaging effect compared to the conventional flat and shallow corrugated diaphragms.