Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Design of Performance-Enhanced Fabry-Perot Micro-Cavity Structure With a Novel Single Deeply Corrugated Diaphragm

Authors: W.J. Wang, R.J. Lin and D.G. Guo

Affilation: Nanyang Technological University, Singapore

Pages: 336 - 339

Keywords: single deeply corrugated diaphragm, Fabry-Perot, sensor

Abstract:
The silicon micromachining technique has been successfully applied to the fabrication of miniature Fabry-Perot sensors. This kind of sensor detects changes in optical path length induced by either a change in the refractive index or a change in physical length of the cavity. In this paper, a novel single deeply corrugated diaphragm (SDCD) structure has been proposed for Fabry-Perot sensor with improved mechanical sensitivity and signal-averaging effect compared to the conventional flat and shallow corrugated diaphragms.

Design of Performance-Enhanced Fabry-Perot Micro-Cavity Structure With a Novel Single Deeply Corrugated Diaphragm

ISBN: 0-9728422-0-9
Pages: 560