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 | Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 11: MEMS Design and Application |
| | The Design of a Biaxial Micro Mirror | | Authors: | X. Zhang, Y. Yao, G. Wang, L. Huang and N. Han | | Affilation: | Intpax Inc., US | | Pages: | 328 - 331 | | Keywords: | mirror, modeling, simulation | | Abstract: | Insights are developed for the design of an electrostatic actuated biaxial micro optical mirror. The relation among the pull-in angle, lift space, electrode size and applied voltage are derived and the simplification is achieved. The analytical and FEM simulation results are compared. It is found that with a constant correction coefficient the analytical formula has good match with the FEM simulation. In this way, the analytical guideline may be applied for fast prototype design while the time-consuming FEM only be taken as the design validation. This design methodology is applied to a specific micro mirror design successfully. |  | View paper | | ISBN: | 0-9728422-0-9 |
| Pages: | 560 |
| Hardcopy: | $125.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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