Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 11: MEMS Design and Application

The Design of a Biaxial Micro Mirror

Authors:X. Zhang, Y. Yao, G. Wang, L. Huang and N. Han
Affilation:Intpax Inc., US
Pages:328 - 331
Keywords:mirror, modeling, simulation
Abstract:Insights are developed for the design of an electrostatic actuated biaxial micro optical mirror. The relation among the pull-in angle, lift space, electrode size and applied voltage are derived and the simplification is achieved. The analytical and FEM simulation results are compared. It is found that with a constant correction coefficient the analytical formula has good match with the FEM simulation. In this way, the analytical guideline may be applied for fast prototype design while the time-consuming FEM only be taken as the design validation. This design methodology is applied to a specific micro mirror design successfully.
The Design of a Biaxial Micro MirrorView PDF of paper
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