Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Superharmonic Resonance of an Electrically Actuated Resonant Microsensor

Authors: E.M. Abdel-Rahman and A.H. Nayfeh

Affilation: Virginia Polytechnic Institute and State University, United States

Pages: 312 - 315

Keywords: MEMS, resonant sensors, forced vibrations, superharmonic resonance

We investigate the response of a microbeam-based resonant sensor to a superharmonic electric actuation. The model incorporates the nonlinearities associated with moderately large displacements and electric forces. The method of multiple scales is used to obtain two first-order nonlinear ordinary-differential equations that describe the modulation of the amplitude and phase of the response and its stability. We present typical resonator frequency-response and force-response curves. The curves demonstrate the existence of multivalued solutions. These curves consist of three branches which meet at two saddle-node bifurcation points. The results provide an analytical tool to predict the microsensor response to a superharmonic excitation, specifically the locations of sudden jumps and regions of hysteretic behavior, thereby enabling designers to safely use this signal as a measuring signal.

Superharmonic Resonance of an Electrically Actuated Resonant Microsensor

ISBN: 0-9728422-0-9
Pages: 560