Authors: O. Bochobza-Degani, D. Elata and Y. Nemirovsky
Affilation: Electrical Engineering Department, Technion, Israel
Pages: 308 - 311
Keywords: charge pull-In, electrostatic actuation, modeling, numerical scheme
This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under voltage-control. Second, a novel numerical scheme for analyzing the stability and extracting the charge Pull-In parameters of charge-controlled actuators is proposed. Third, a novel strategy for further extending the travel-range of charge-controlled actuators is suggested.