Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
 
Chapter 11: MEMS Design and Application
 

Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme

Authors:O. Bochobza-Degani, D. Elata and Y. Nemirovsky
Affilation:Electrical Engineering Department, Technion, IL
Pages:308 - 311
Keywords:charge pull-In, electrostatic actuation, modeling, numerical scheme
Abstract:This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under voltage-control. Second, a novel numerical scheme for analyzing the stability and extracting the charge Pull-In parameters of charge-controlled actuators is proposed. Third, a novel strategy for further extending the travel-range of charge-controlled actuators is suggested.
Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical schemeView PDF of paper
ISBN:0-9728422-0-9
Pages:560
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