Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS

	Nanotech 2003 Vol. 1 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1 Chapter 11: MEMS Design and Application
	Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS
Authors:	J.A. Pelesko, D.H. Bernstein and J. McCuan
Affilation:	University of Delaware, US
Pages:	304 - 307
Keywords:	electrostatic actuation, mathematical model, symmetry breaking
Abstract:	We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.
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ISBN:	0-9728422-0-9
Pages:	560
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