Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS

Authors: J.A. Pelesko, D.H. Bernstein and J. McCuan

Affilation: University of Delaware, United States

Pages: 304 - 307

Keywords: electrostatic actuation, mathematical model, symmetry breaking

Abstract:
We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.

Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS

ISBN: 0-9728422-0-9
Pages: 560