Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS

Authors: J.A. Pelesko, D.H. Bernstein and J. McCuan

Affilation: University of Delaware, United States

Pages: 304 - 307

Keywords: electrostatic actuation, mathematical model, symmetry breaking

Abstract:
We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.


ISBN: 0-9728422-0-9
Pages: 560

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