 | Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 11: MEMS Design and Application |
| - | Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach |
| | H. Koser, F. Cros, M.G. Allen, J.H. Lang |
| | Massachusetts Institute of Technology, US |
| - | Mixed-Level Model for Highly Perforated Torsional Actuators Coupling the Mechanical, the Electrostatic and the Fluidic Domain |
| | R. Sattler, G. Schrag and G. Wachutka |
| | Institute for Physics of Electrotechnology, DE |
| - | System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models |
| | J.A. Martínez, T.P. Kurzweg, S.P. Levitan, A.J. Davare, M. Kahrs and D.M. Chiarulli |
| | University of Pittsburgh, US |
| - | Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer |
| | H. Xie, G.K. Fedder, Z. Pan and W. Frey |
| | University of Florida, US |
| - | Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors |
| | J.H. Chen, W. Weingar, A. Azarov and R.C. Giles |
| | Agere Systems, US |
| - | Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching |
| | J. Bryzek, S. Nasiri, A. Flannery, H. Kwon, M. Novack, D. Marx, El Sigari, E. Chen and J. Garate |
| | Transparent Networks, US |
| - | Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS |
| | J.A. Pelesko, D.H. Bernstein and J. McCuan |
| | University of Delaware, US |
| - | Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme |
| | O. Bochobza-Degani, D. Elata and Y. Nemirovsky |
| | Electrical Engineering Department, Technion, IL |
| - | Superharmonic Resonance of an Electrically Actuated Resonant Microsensor |
| | E.M. Abdel-Rahman and A.H. Nayfeh |
| | Virginia Polytechnic Institute and State University, US |
| - | Air Damping in an Ultra-High-Frequency Disk Resonator |
| | L.Y. Yap, L.K. Yap and W. Ye |
| | Georgia Institute of Technology, US |
| - | Monte Carlo Modeling of Micro-Scale Gas Flows |
| | J. Fan and C. Shen |
| | Chinese Academy of Sciences, CN |
| - | Size and Strain Rate Effects in Tensil Deformation of Cu Nanowires |
| | W. Liang and M. Zhou |
| | Georgia Institute of Technology, US |
| - | The Design of a Biaxial Micro Mirror |
| | X. Zhang, Y. Yao, G. Wang, L. Huang and N. Han |
| | Intpax Inc., US |
| - | Design and Simulation of the GaAs Micromechanical Thermal Converter for Microwave Transmitted Power Sensor |
| | J. Jakovenko, M. Husak, E. Burian and T. Lalinsky |
| | Czech Technical University, CZ |
| - | Design of Performance-Enhanced Fabry-Perot Micro-Cavity Structure With a Novel Single Deeply Corrugated Diaphragm |
| | W.J. Wang, R.J. Lin and D.G. Guo |
| | Nanyang Technological University, SG |
| - | Development of a Resonant Magnetometer |
| | Z. Izham, M.C.L. Ward, K.M. Brunson and P.C. Stevens |
| | Microsystems Mechanical Engineering, UK |
| - | Modeling and Simulation of A Surface Micromachined Triaxial Accelerometer |
| | L. Jiang, W.N. Carr |
| | New Jersey Institute of Technology, US |
| - | The Analysis of the Influence of the Auxiliary Components on FBAR Response |
| | T.K. Shing, C.H. Tai, Y.D. Lee and C.C. Tien |
| | ITRI, TW |
| - | Analysis of Temperature Effect on Diaphragm Resonant Sensors |
| | W. Faris |
| | Virginia Polytechnic and State Univeristy, US |
| - | A Novel Structure for PZT-Based Piezoelectric Microphone |
| | H.J. Zhao, T.L. Ren, J.S. Liu, L.T. Liu, Z.J. Li |
| | Tsinghua University, CN |
| - | Modeling and Optimal Design of High Sensitivity Piezoresistive Microcantilevers for Biosensing Applications |
| | M. Yang, X. Zhang and C.S. Ozkan |
| | University of California Riverside, US |
| - | Mechanical Damping due to Interface Motion in Micro-Resonators |
| | D.N. Pawaskar and R. Phillips |
| | California Institute of Technology, US |
| - | A New Method of Excluding The External Acceleration’s Effect in a Micromachined Magnetometer for Navigation Systems |
| | J-M Cho, K.S. Kim, S.D. An, H.J. Park and G. Hahm |
| | Samsung Electromechanics Co., LTD., KP |
| - | New Micro Hydro Power Device |
| | S. Pobering, N. Schwesinger, |
| | Münich University of Technology, DE |
| - | Optimization of Thermally Actuated Bimorph Cantilevers for Maximum Deflection |
| | W. Peng, Z. Xiao and K.R. Farmer |
| | New Jersey Institute of Technology, US |
| - | Simulation of a Diamond-Based Bistable Thermal Microswitch |
| | P. Schmid, F.J. Hernandez-Guillen and E. Kohn |
| | University of Ulm, DE |
| - | Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures |
| | E. Socher, O. Bochobza-Degani, D. Elata and Y. Nemirovsky |
| | Israel Institute of Technology, IL |
| - | Coupling Spring Design and Insertion Loss Minimization of Second Order MicroElectroMechanical Filters |
| | M. Naseer, M. Parlak, T. Bechteler, Y. Gurbuz |
| | Sabanci University, TR |
| - | Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications |
| | E. Sarajlic, E. Berenschot, G. Krijnen, M. Elwenspoek |
| | University of Twente, NL |
| - | High Resolution Silicon Accelerometer Using Eutectic Bonding |
| | Y. Kwang, J.C. Yeon, Y.H. Kim, S.W. Rhee and S.H. Oh |
| | Seoul National University, KR |
| - | FEM Assisted Design of Novel Electrothermal Actuators |
| | S. Deladi, G. Krijnen and M. Elwenspoek |
| | University of Twente, NL |
| - | Operation and Testing of a Micro Heat Engine |
| | S. Whalen, R. Richards, D. Bahr and C. Richards |
| | Washington State University, US |
| - | Design and Simulation of a MicroElectroMechanical Resonator Oscillator |
| | M. Parlak, M. Naseer and Y. Gurbuz |
| | Sabanci University, TR |
| - | Coupled Substrate-resonator-electrostatic Simulation and Validation fo High-Q MEMS Resonator Performance |
| | Y.H. Park and K.C. Park |
| | University of Colorado at Boulder, US |
| - | High-fidelity MEMS Switch Model |
| | Y.H. Park,Y. Miyazaki and K.C. Park |
| | University of Colorado at Boulder, US |
| - | Dynamically Amplified Rate Integrating Gyroscopes |
| | C. Painter and A. Shkel |
| | University of California, Irvine, US |
| - | A Nanoscopic Rotary Electrostatic Motor |
| | J.H. Wright, D.P. Sheehan and T.F. Schubert Jr. |
| | University of San Diego, US |
| - | MEMS Gyroscopes with Structurally Decoupled 2-DOF Drive and Sense Mode Oscillators |
| | C. Acar and A.M. Shkel |
| | University of California, Irvine, US |
| - | Simulation of Cantilever Beam Micro-switch Pull-in and Collapse Voltages |
| | J.R. Reid and L.A. Starman |
| | Air Force Research Laboratory, US |
| - | Development of the Multi-pixel X-ray Microcalorimeters |
| | H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, H. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N.Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. Fujimori, Y. Ishisaki, U. Morita, T. Ohashi, Y. Kuroda, M. Onishi and K. Otake |
| | Waseda University, JP |
| - | Extensions of Spring Model Approach for Continuum-based Topology Optimization of Compliant Mechanisms. |
| | M. Sharma and T. Udeshi |
| | Zyvex Corporation, US |
| - | A Vertical MOSFET for Charge Sensing in the Convex Corner of Si Microchannels |
| | G. Lim, C-S Park, H-K Lyu, D-S Kim, J-K Shin, P. Choi and M. Lee |
| | Kyungpook National University, KP |
| - | Modelling and Simulation of Mechanical, Thermal and Electrical Behaviour of Si Cantilever with Implanted Strain Gauge |
| | M. Husak, J. Jakovenko, P. Kulha and Z. Vborn |
| | Czech Technical University in Prague, CZ |
| - | MEMS Technologies for Communications |
| | C.T.-C. Nguyen |
| | DARPA/MTO, US |
| - | Nanoscience and Nanotechnology:Two New Exciting Fields for Future Display Applications |
| | Z. Yaniv |
| | Applied Nanotech, Inc., US |
| - | NanoMuscle at the Nano-Frontier |
| | H. Nash, R. MacGregor, P. Von Behrens, A. Szilagyi |
| | NanoMuscle, US |
| ISBN: | 0-9728422-0-9 |
| Pages: | 560 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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