Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 10: Smart MEMS and Sensor Systems

Microsystem Modeling - from Macromodels to Microsystem Design

Authors:M. Husak
Affilation:University of Prague, CZ
Pages:272 - 275
Keywords:microsystems, sensors, actuators, system, model, equivalence
Abstract:The paper presents ideas about possible approaches to development of microsystem models. From the general point of view, microsystem (MST) is considered as a system dealing with non-electrical quantities from all energy domains of real environment. System modeling of properties of the whole system is required for complex approach to MST design. System modeling is described on higher and lower level. For design optimization it is necessary to use modeling on structural and material levels, further it is necessary to consider influence of technological process and modeling on physical level. Frequently design can be simplified utilizing equivalent models realized by equivalence of discrete elements between various energy domains. It is possible to demonstrate MST operation using, micromodels (SOFT) or macromodels (HARD). Micromodels are developed from macromodels according to the rules for design of integrated MST.
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