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 | Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 10: Smart MEMS and Sensor Systems |
| - | Using Very Large Arrays of Intelligent Sensors | | | R.M. Newman | | | Coventry University, UK |
| - | The Monolithic Integration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh Environment Applications | | | E. Hailu, A.R. Atwell, J.S. Duster, C. Li, M. Balseanu and K.T. Kornegay | | | Cornell University, US |
| - | Microsystem Modeling - from Macromodels to Microsystem Design | | | M. Husak | | | University of Prague, CZ |
| - | Microsensors, Arrays and Automatic Diagnosis of Sensor Faults | | | E. Gaura and R.M. Newman | | | Coventry University, UK |
| ISBN: | 0-9728422-0-9 |
| Pages: | 560 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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