Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

Chapter 10:

Smart MEMS and Sensor Systems

-Using Very Large Arrays of Intelligent Sensors
 R.M. Newman
 Coventry University, UK
-The Monolithic Integration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh Environment Applications
 E. Hailu, A.R. Atwell, J.S. Duster, C. Li, M. Balseanu and K.T. Kornegay
 Cornell University, US
-Microsystem Modeling - from Macromodels to Microsystem Design
 M. Husak
 University of Prague, CZ
-Microsensors, Arrays and Automatic Diagnosis of Sensor Faults
 E. Gaura and R.M. Newman
 Coventry University, UK
ISBN:0-9728422-0-9
Pages:560
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