Smart MEMS and Sensor Systems

	Nanotech 2003 Vol. 1 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1 Chapter 10: Smart MEMS and Sensor Systems
-	Using Very Large Arrays of Intelligent Sensors
	R.M. Newman
	Coventry University, UK
-	The Monolithic Integration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh Environment Applications
	E. Hailu, A.R. Atwell, J.S. Duster, C. Li, M. Balseanu and K.T. Kornegay
	Cornell University, US
-	Microsystem Modeling - from Macromodels to Microsystem Design
	M. Husak
	University of Prague, CZ
-	Microsensors, Arrays and Automatic Diagnosis of Sensor Faults
	E. Gaura and R.M. Newman
	Coventry University, UK
ISBN:	0-9728422-0-9
Pages:	560
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