Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 9: Software Tools, CAD Systems

Web-Based Design Tools for MEMS-Process Configuration

Authors:K. Hahn and R. Brück
Affilation:University of Siegen, DE
Pages:346 - 349
Keywords:MEMS physical design, process configuration, internet tool access, component technology, JAVA
Abstract:The micro electromechanical systems (MEMS) industry is characterized by small and medium sized enterprises (SMEs) specialized on products to solve problems in specific domains like medicine, automotive sensor technology, etc. In this field of business the technology driven design approach known from micro electronics is not appropriate. Instead each design problem aims at its own, specific technology to be used for the solution. The variety of technologies at hand, like Si-surface, Si-bulk, LIGA, laser, precision engineering requires a huge set of different design tools to be available. No single SME can afford to hold licenses for all these tools. This calls for a new and flexible way of designing, implementing and distributing design software. The Internet provides a flexible manner of offering software access along with methodologies of flexible licensing e.g. on a pay-per-use basis. INTERLIDO is a tool suite for process specification and layout verification for lithography based MEMS technologies to be accessed via the Internet. The first version provides a Java implementation of LIDO- PEdit, a graphical configuration system for process step sequences. The implementation is based on JavaBeans component technology.
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