MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Numerics, Algorithims Chapter 8

Modeling of Piezoelectric MEMS Using the Finite Cloud Method

Authors: R.R. Ohs and N.R. Aluru

Affilation: University of Illinois, United States

Pages: 293 - 296

Keywords: meshless methods, piezoelectrics, MEMS

Abstract:
In this paper we present a meshless based Finite Cloud Method (FCM) for the numerical solution of partial differential equations (PDEs) governing piezoelectricity. Using a point distribution, FCM constructs interpolation functions without assuming any connectivity between the points. A collocation approach is employed to obtain a solution at every point within the domain. The coupled mechanical and electrical equations of a piezoelectric material are solved by an iterative FCM. This approach has been verified on two static two-dimensional piezoelectric problems with exact analytical solutions

Modeling of Piezoelectric MEMS Using the Finite Cloud Method

ISBN: 0-9666135-4-6
Pages: 697