Compact Modeling of Bistable Electrostatic Actuators

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 7: Equivalent Circuits, Behavioral and Multilevel Simulation
	Compact Modeling of Bistable Electrostatic Actuators
Authors:	J. Xu, R.B. Darling and P.O. Lauritzen
Affilation:	University of Washington, US
Pages:	289 - 292
Keywords:	bistability, cantilevers, compact modeling, electrostatic actuators, MEMS switches
Abstract:	A compact circuit simulation model for a bistable electrostatic cantilever actuator is presented which is appropriate for circuit and system simulation of RF MEMS switches. This simplified model captures the essential physical features of a cantilever, including hysteresis and bistability, making it suitable for large-signal circuit analyses. The model is extremely compact by means of using only a single internal system variable and requires only a small number of material and geometrical parameters. The model also properly conserves charge while still representing a voltage-variable, bistable capacitance.
	View paper
ISBN:	0-9666135-4-6
Pages:	697
Special:	3 CD Set — 15% off with Free Shipping
Up