Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Equivalent Circuits, Behavioral and Multilevel Simulation

Compact Modeling of Bistable Electrostatic Actuators

Authors:J. Xu, R.B. Darling and P.O. Lauritzen
Affilation:University of Washington, US
Pages:289 - 292
Keywords:bistability, cantilevers, compact modeling, electrostatic actuators, MEMS switches
Abstract:A compact circuit simulation model for a bistable electrostatic cantilever actuator is presented which is appropriate for circuit and system simulation of RF MEMS switches. This simplified model captures the essential physical features of a cantilever, including hysteresis and bistability, making it suitable for large-signal circuit analyses. The model is extremely compact by means of using only a single internal system variable and requires only a small number of material and geometrical parameters. The model also properly conserves charge while still representing a voltage-variable, bistable capacitance.
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