MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multilevel Simulation Chapter 7

Compact Modeling of Bistable Electrostatic Actuators

Authors: J. Xu, R.B. Darling and P.O. Lauritzen

Affilation: University of Washington, United States

Pages: 289 - 292

Keywords: bistability, cantilevers, compact modeling, electrostatic actuators, MEMS switches

A compact circuit simulation model for a bistable electrostatic cantilever actuator is presented which is appropriate for circuit and system simulation of RF MEMS switches. This simplified model captures the essential physical features of a cantilever, including hysteresis and bistability, making it suitable for large-signal circuit analyses. The model is extremely compact by means of using only a single internal system variable and requires only a small number of material and geometrical parameters. The model also properly conserves charge while still representing a voltage-variable, bistable capacitance.

Compact Modeling of Bistable Electrostatic Actuators

ISBN: 0-9666135-4-6
Pages: 697