Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Equivalent Circuits, Behavioral and Multilevel Simulation

Parameterized Electrostatic Gap Model for Structured Design of Microelectroelectrical Systems

Authors:M.S. Lu and G.K. Fedder
Affilation:Carnegie Mellon University, US
Pages:280 - 283
Keywords:MEMS, CAD, layout, synthesis, methodology, optimization
Abstract:VLSI system designers can begin their design process with a behavrioal description of a system, then proceed to physical design. MEMS designers typiclly begin with device design, this process is opten followed by several fabrication iterations for device characterization, and the rest of the system-the electronics and packaging-are layered on top of the device in successive design iterations. THis methodology results in long design cycles and is very costly. A more structred approach to MEMS CAD would permit th edesigner to specify system level performance goals and then propagate those
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