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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Equivalent Circuits, Behavioral and Multilevel Simulation |
| | Parameterized Electrostatic Gap Model for Structured Design of Microelectroelectrical Systems | | Authors: | M.S. Lu and G.K. Fedder | | Affilation: | Carnegie Mellon University, U.S.A. | | Pages: | 280 - 283 | | Keywords: | MEMS, CAD, layout, synthesis, methodology, optimization | | Abstract: | VLSI system designers can begin their design process with a behavrioal description of a system, then proceed to physical design. MEMS designers typiclly begin with device design, this process is opten followed by several fabrication iterations for device characterization, and the rest of the system-the electronics and packaging-are layered on top of the device in successive design iterations. THis methodology results in long design cycles and is very costly. A more structred approach to MEMS CAD would permit th edesigner to specify system level performance goals and then propagate those | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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