Model Based Identification as a New Tool to Extract Physical Parameters of Microactuators from Measurements with Error Bounds

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 7: Equivalent Circuits, Behavioral and Multilevel Simulation
	Model Based Identification as a New Tool to Extract Physical Parameters of Microactuators from Measurements with Error Bounds
Authors:	C. Rembe, E.P. Hofer and B. Tibken
Affilation:	University of Ulm, DE
Pages:	276 - 279
Keywords:	microactuator, model identification, guaranteed parameter estimation, high speed visualization, dynamics
Abstract:	Model based evaluation of high speed cinematographic image sequences is demonstrated for a microrelay which was manufactured using the LIGA technology. The measurements of the microrelay have been performed with an experimental setup based on the stroboscopic principle and the complete identification of the dynamic model of the microrelay using cinematographic position data is carried out. The procedure described in this paper combines visualization technique and model identification methods as an important step in reengineering to improve the dynamic behavior of microactuators.
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ISBN:	0-9666135-4-6
Pages:	697
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