Electro-Mechanical Transducer for MEMS Analysis in ANSYS

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 7: Equivalent Circuits, Behavioral and Multilevel Simulation
	Electro-Mechanical Transducer for MEMS Analysis in ANSYS
Authors:	M. Gyimesi and D. Ostergaard
Affilation:	ANSYS, Inc., US
Pages:	270 - 273
Keywords:	micro electro-mechanical system MEMS, finite element analysis FEA, transducer, capacitor, strongly coupled simulation
Abstract:	The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.
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ISBN:	0-9666135-4-6
Pages:	697
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