Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Equivalent Circuits, Behavioral and Multilevel Simulation

Electro-Mechanical Transducer for MEMS Analysis in ANSYS

Authors:M. Gyimesi and D. Ostergaard
Affilation:ANSYS, Inc., US
Pages:270 - 273
Keywords:micro electro-mechanical system MEMS, finite element analysis FEA, transducer, capacitor, strongly coupled simulation
Abstract:The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.
Electro-Mechanical Transducer for MEMS Analysis in ANSYSView PDF of paper
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