Authors: M. Gyimesi and D. Ostergaard
Affilation: ANSYS, Inc., United States
Pages: 270 - 273
Keywords: micro electro-mechanical system MEMS, finite element analysis FEA, transducer, capacitor, strongly coupled simulation
The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.