Sarraute E., Dufour I.
URA CNRS 1375, FR
Keywords: beam, electrostatic, magnetic, modeling, piezoelectric
The aim of this paper is to establish simple analytical equations of the beam deflection for different actuation methods (magnetic with current, magnetic with magnet, electrostatic and piezoelectric). The analytical formulae are obtained from the study of the physical phenomena. Although the results presented are obtained by making certain approximations, this study provides order of magnitude results for the deflection, and most importantly quantifies the influence of each parameter (current, voltage, thickness, length, etc.).
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 266 - 269
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6