Authors: F. Oms-Elisabelar, C. Bergaud, L. Nicu and A. Martinez
Affilation: CNRS, France
Pages: 249 - 253
Keywords: equivalent circuit, global simulation, piezoelectric actuator, MEMS
In this paper, we describe both the static and dynamic behaviors of an AFM-like piezoelectric actuator using a transformer equivalent circuit in which both the electrical and mechanical portions are represented by electrical equivalencies. The equivalent circuit is develped starting grom electromechanical transduction principles and included in a commercial SPICE package. ANalytical and simulated results are compared and found in good agreement both for static and dynamic analysis.