Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
 
Chapter 7: Equivalent Circuits, Behavioral and Multilevel Simulation
 

Modeling a Piezoelectric Actuator Using a Transformer Equivalent Circuit

Authors:F. Oms-Elisabelar, C. Bergaud, L. Nicu and A. Martinez
Affilation:CNRS, FR
Pages:249 - 253
Keywords:equivalent circuit, global simulation, piezoelectric actuator, MEMS
Abstract:In this paper, we describe both the static and dynamic behaviors of an AFM-like piezoelectric actuator using a transformer equivalent circuit in which both the electrical and mechanical portions are represented by electrical equivalencies. The equivalent circuit is develped starting grom electromechanical transduction principles and included in a commercial SPICE package. ANalytical and simulated results are compared and found in good agreement both for static and dynamic analysis.
ISBN:0-9666135-4-6
Pages:697
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