Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration

HEMT Optimization by Advanced RSM Models

Authors:M.D. Profirescu, G. Dima, B. Govoreanu and O. Mitrea
Affilation:University Politehnica of Bucharest, RO
Pages:214 - 217
Keywords:optimization, design of experiments (DOE), response surface model (RSM), HEMT
Abstract:In this paper, the optimization of heterostructure devices using the Design of Experiments concept and advanced Response Surface Models is presented. As an example, the structural optimization of a pseudomorphic Al0.2Ga0.8As/In0.2Ga0.8As/GaAs pulse doped HEMT is discussed.
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