MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 6: Characterization, Parameter Extraction, Calibration
	MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000
Authors:	A. Gutierrez, S. Aceto, M. Simkulet, D. Patti, M. Liendhard, T. Krawczyk and A. Lundgren
Affilation:	InterScience, Inc, US
Pages:	210 - 213
Keywords:	model verification, materials parameter extraction, MEMSPEC-2000, MEMS, MST
Abstract:	We describe the current status of the MEMSPEC-2000 MEMS/MST characterization system. This system has been designed to provide automated multi-domain measurements of a wide range of MEMS/MST devices. The system is capable of high resolution surface profiling across the whole surface of a wafer. It can also be used to study motion of micro devices, both in-plane and out-of-plane. The system uses non-contact laser probing and automated navigation across a wafer. The system is at present fully functional and being benchmarked against a wide variety of test devices.
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ISBN:	0-9666135-4-6
Pages:	697
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