Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration

MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000

Authors:A. Gutierrez, S. Aceto, M. Simkulet, D. Patti, M. Liendhard, T. Krawczyk and A. Lundgren
Affilation:InterScience, Inc, US
Pages:210 - 213
Keywords:model verification, materials parameter extraction, MEMSPEC-2000, MEMS, MST
Abstract:We describe the current status of the MEMSPEC-2000 MEMS/MST characterization system. This system has been designed to provide automated multi-domain measurements of a wide range of MEMS/MST devices. The system is capable of high resolution surface profiling across the whole surface of a wafer. It can also be used to study motion of micro devices, both in-plane and out-of-plane. The system uses non-contact laser probing and automated navigation across a wafer. The system is at present fully functional and being benchmarked against a wide variety of test devices.
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