MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 6

MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000

Authors: A. Gutierrez, S. Aceto, M. Simkulet, D. Patti, M. Liendhard, T. Krawczyk and A. Lundgren

Affilation: InterScience, Inc, United States

Pages: 210 - 213

Keywords: model verification, materials parameter extraction, MEMSPEC-2000, MEMS, MST

Abstract:
We describe the current status of the MEMSPEC-2000 MEMS/MST characterization system. This system has been designed to provide automated multi-domain measurements of a wide range of MEMS/MST devices. The system is capable of high resolution surface profiling across the whole surface of a wafer. It can also be used to study motion of micro devices, both in-plane and out-of-plane. The system uses non-contact laser probing and automated navigation across a wafer. The system is at present fully functional and being benchmarked against a wide variety of test devices.


ISBN: 0-9666135-4-6
Pages: 697

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