Nano Science and Technology Institute
MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
 
Chapter 6: Characterization, Parameter Extraction, Calibration
 

SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing

Authors:T. Tatsumi, H. Ansai, M. Mukai and Y. Komatsu
Affilation:Sony Corporation, JP
Pages:202 - 205
Keywords:process simulation, data conversion, expert system
Abstract:We have developed a system called SPDC, which is designed to automatically generate input data for simulation from process ow data for manufacturing. As this conversion is not one-to-one translation, SPDC prepares databased knowledge called "scenario" from both device and simulation expert engineers. This database is utilized to analyze process ow data for manufacturing and then to synthesize input data for simulation. SPDC enabled device engineers unfamiliar to simulation utilization to prepare input data reducing more than three days work to less than a few minutes work. The quality of the synthesized input data is perfectly comparable to the one written by expert simulation users.
SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for ManufacturingView PDF of paper
ISBN:0-9666135-4-6
Pages:697
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