Authors: M.H. Zaman, S.F. Bart, V.L. Rabinovich, C.K. Ghaddar, I. Tchertkov and J.R. Gilbert
Affilation: Microcosm Technologies, Inc., United States
Pages: 163 - 167
Keywords: micro-system, MEMS, MST, CAD, Macro-model, Simulation
This paper presents a comprehensive CAD environment for MEMS/MST design. The design flow includes MEMS mechanical schematic entry, parameterized cell layout generation, LVS style error checking, lumped parameter macro-model generation, and system level modeling of the micro-system. The design environment also provides error checking between different design views. The implemented macromodel extraction technique can be used for micro-systems that can be represented as multi-component massspring-dashpot structures. Good accuracy is demonstrated in both spatial-domain and frequency-domain dynamic behavior of the models.