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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration |
| | A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems | | Authors: | M.H. Zaman, S.F. Bart, V.L. Rabinovich, C.K. Ghaddar, I. Tchertkov and J.R. Gilbert | | Affilation: | Microcosm Technologies, Inc., U.S.A. | | Pages: | 163 - 167 | | Keywords: | micro-system, MEMS, MST, CAD, Macro-model, Simulation | | Abstract: | This paper presents a comprehensive CAD environment for MEMS/MST design. The design flow includes MEMS mechanical schematic entry, parameterized cell layout generation, LVS style error checking, lumped parameter macro-model generation, and system level modeling of the micro-system. The design environment also provides error checking between different design views. The implemented macromodel extraction technique can be used for micro-systems that can be represented as multi-component massspring-dashpot structures. Good accuracy is demonstrated in both spatial-domain and frequency-domain dynamic behavior of the models. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
| Hardcopy: | $100.00 |
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