A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 6: Characterization, Parameter Extraction, Calibration
	A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems
Authors:	M.H. Zaman, S.F. Bart, V.L. Rabinovich, C.K. Ghaddar, I. Tchertkov and J.R. Gilbert
Affilation:	Microcosm Technologies, Inc., US
Pages:	163 - 167
Keywords:	micro-system, MEMS, MST, CAD, Macro-model, Simulation
Abstract:	This paper presents a comprehensive CAD environment for MEMS/MST design. The design flow includes MEMS mechanical schematic entry, parameterized cell layout generation, LVS style error checking, lumped parameter macro-model generation, and system level modeling of the micro-system. The design environment also provides error checking between different design views. The implemented macromodel extraction technique can be used for micro-systems that can be represented as multi-component massspring-dashpot structures. Good accuracy is demonstrated in both spatial-domain and frequency-domain dynamic behavior of the models.
	View PDF of paper
ISBN:	0-9666135-4-6
Pages:	697
Special:	3 CD Set — 15% off with Free Shipping
Up